ULTRAPOL Advance Polishing Machine Brochure

Next generation polishing workstation for materials and failure analysis.

Topside

Cross-Section

Backside

We stock a wide range of sample preparation consumables!

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OPTICAL ALIGNMENT

Enabling layer by layer removal on smaller geometries.

Our patented ULTRACOLLIMATOR technology allows for fast accurate and repeatable parallel alignment of surfaces to the polisher. Since the collimator beam optically aligns directly to the die, there is no guesswork or the need to use mechanical indicators. Alignment is constantly monitored during polishing.

Transfer to-and-from the microscope is made fast and accurate.

Any small realignments can be made quickly and accurately.

For TEM preparation accurate wedge polishing angles can be induced while the angle off-set is shown on the monitor screen.

IMPROVED POLISHING PERFORMANCE Flatter and more parallel than ever before.

ULTRAPOL Advance has been designed to allow for both open-loop (DI water feed) or closed-loop (e.g. colloidal silica recirculation) coolant provisions. A wide variety of lapping and polishing surfaces – diamond films, pads & cloths and metalbond diamond surfaces allow for suitable polishing recipes. Our polyurethane-faced plates allow for low relief, high edge retention delayering, when used with specialist colloidal silica’s and the correct polishing parameters.

ADVANCED FEATURES

Intuitive design & optimized ergonomics.

ULTRAPOL Advance incorporates key improvements in the control of all polishing parameters, sample mounting, sample transfer, caibration. The trademark accuracy of our MULTIPOL Polishing Jig design has been maintaned.

Advance’s polishing head offers improved ergonomics. Ease of cleaning is always of paramount importance for all surface preparation applications -- this has been made fast and convenient with the use of a removable custom containment tray.

- Precision sample load control.

- 1 micron ‘Z’ height control.

‘Easy Lift’ Polishing Head.

‘Quick Release’ Sample Interface.

Open or Closed Loop Coolant/Slurry System.

MARKET-LEADING WORKHOLDER DESIGNS Rapid transfer to & from optical and electron microscopes.

Backside of Die

SEM & FIB STUB DE-PROCESSING HOLDERS ITEM Hitachi (Shown Above) JEOL FEI PHILIPS CREDENCE

ORDER CODE 6172.H 6172.J 6172.F 6172.P 6172.C

Custom holders are also available.

6170.1 Standard Mounting Plate

Optical Flat

6124.1 Encapsulated Mount Fixture – Holds 0.5 inch to 1.5 inch diameter mounts.

6150.1 Quick Release Vise for holding packages, large dice, waveguides etc.

6145.1 Single Die Stub Cross-section holder.

ORDER CODE

ITEM

3250.1

ULTRAPOL Advance

6183.U

ULTRACOLLIMATOR Upgrade

Includes…

Base unit with timer, oscillator, speed control (50 to 400rpm) 8” (200mm diameterr polishing plate) Z-direction control with 1um precision 2 circle tilt control (+/- 2 degrees) Sample Rotation control Quick release mounting system Sample Load Control – 0 to 3 kg (in 50 gram increments) Drip Tray / Slurry Containment Tray

Includes main ULTRACOLLIMATOR unit Incorporating lightsource and camera, cross-hair generator, and 6.5” LCD monitor, with Video Out (ntsc). Includes optical flat and mounting bracket for ULTRAPOL advance

ACCESSORIES 6170.1 --

Standard Sample Mounting Plate WORKHOLDERS – see inside brochure

1503.1

Disc Holding Band

2239.1

Spare 8” (200mm) Diameter Polishing Plate

3208.8

Polyurethane-faced Delayering Plate

6158.1

Recirculating Pump for slurry polishing

3230.1

Spare Plastic Slurry Containment tray

Front Cover Images: Topside UV image of a 65/90nm technology device, deprocessed to M1. Image taken on ICis Microscope with 100X objective. Magnification approx. 2000X Cross-Section image of unencapsulated die, held with 6145.1 SEM Stub Holder, taken on ICis Microscope with 20X Objective. Magnification approx 500X Backside image of thinned, polished and AR-coated flip-chip die, taken on ICis Microscope with 50X Objective. Magnification approx. 1000X

Represented in your area by:

Toll Free (US) 1-877-542-0609

Tel: 1-714-542-0608 Fax: 1-714-542-0627 1025 E. Chestnut Ave. Santa Ana, CA 92701-6425, USA Email: info@ultratecusa.com

www.ultratecusa.com ULTRA TEC is proud to operate a continuous product improvement program. Product specifications and appearance are subject to modifications without prior notification.