ULTRAPOL advance FLAT POLISHING MACHINE
Delayering of Copper IC devices
ULTRAPOL advance FLAT POLISHING MACHINE
Delayering of Copper IC devices
ULTRAPOL advance Flat Polishing Machine
Front Panel Access to All Parameters
ULTRAPOL advance Fine Pressure Control
Coarse Pressure Control
System offers ULTRA TEC’s signature ‘Quick Release’ Sample holder Cam-lock design and precise two circle angular adjustment. Precise Pressure Control is shown
ULTRAPOL advance
Fast Amplitude Setting (Think ASAP-1 Analog system!)
ULTRAPOL advance
Faucet (plumbed in)
Recirculating Pump
Fluid can run to drain or be recirculated, dependent on the process. The drip tray is removable for fast, effective clean-up.
ULTRAPOL advance
A Choice of Polishing Pads and Films are available, in stock, to achieve Best Known Techniques for all sample types
ULTRAPOL advance Angular Alignment with ULTRACOLLIMATOR
ULTRAPOL advance
ULTRAPOL advance Angular Alignment
ULTRAPOL advance
Optically-enhanced Single Die ‘Stub’ holders (JEOL shown above) allow for convenient, rapid transfer to a wide range of SEM’s, FIB’s
ULTRAPOL advance PROCESS CONDITIONS
Sample Type: Cu Technology Bare Die Stage Oscillation: 1 Head Rotation Speed: 1 Sample Load: 100g Lap Rotation Speed: 50 rpm Polishing Pad Type: Fiberpad (black) Abrasive Media: Blue Colloidal Silica
ULTRAPOL advance
Mag= 500x Customer images taken by JEOL tungsten SEM (JEOL 6610LV). The images were taken on a single die sample and show Cu metal structure after delayering
ULTRAPOL advance
Mag= 2000x Customer images taken by JEOL tungsten SEM (JEOL 6610LV). The images were taken on a single die sample and show Cu metal structure after delayering
ULTRAPOL advance
Mag= ~4000x Further Close-up of Customer images showing Cu metal structure after delayering on ULTRAPOL Advance
ULTRAPOL advance
Each Advance System is shipped with a case containing weights, holders and useful accessories
ULTRAPOL advance
For less demanding, or lower specification requirements, ULTRAPOL Advance is also available without the ULTRACOLLIMATOR. Supplied mechanical gauges are used to calibrate the system.
ULTRAPOL advance
ULTRA TEC offers the widest range of sample holders for precision polishing
ULTRAPOL advance
The Hot Plate Transfer Fixture provides a safe & convenient way to work with heated sample holders
Also Available for the Sample Preparation Lab Toolkit…
ULTRAPOL Advance
ASAP-1® IPS
ICis Materials Inspection System
ICis Materials Inspection System
ICis offers 3 imaging modes – NIR (for backside prep), Visible (for planar polish / x-sections) and UV (for maximum surface definition). Full range of specialist objective lenses available.
ICis Materials Inspection System Illumination Sources
ICis Materials Inspection System
ICis Materials Inspection System Backside (NIR) Imaging
Si Thickness Here
ULTRASPEC-III
Integrated algorithms enables stage motion positioning and direct readout of remaining Silicon Thickness. Windows 7 Version now shipping. ICis Software is powered by FA Instruments
SUMMARY ULTRAPOL Advance enables‌
Improved Parallel Polish / De-process Live ULTRACOLLIMATOR Mode Fast, convenient and /accurate angular adjustment TO THE DIE Floating Head Control for unsurpassed polishing quality The Widest Range of Sample Holders
SUMMARY ULTRA TEC provides‌ Global Sales & Product Support In-stock Consumable products Application Knowledge Base In-house Design, Manufacture & Test On-site Installation & Training Applications Lab for Product & process development Market-leading customer portfolio We look forward to working with you!
ULTRAPOL forms part of ULTRA TEC’s
More Information at:
www.ultratecusa.com
ULTRAPOL advance FLAT POLISHING MACHINE