Microsoft Word - ULTRACOLLIMATOR Datasheet.doc

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Optical Alignment Device

ENHANCING THE PARALLELISM PERFORMANCE OF POLISHING MACHINERY The new ULTRACOLLIMATOR modules, allow the user to produce the finest results of sample parallelism with both flat lapping and selected area preparation machines. The units produce a ‘single box’ solution, incorporating an lcd screen and all the controls required to align and test the sample. The use of optical alignment allows for simpler faster and significantly more accurate alignment to be achieved on a range of sample types and applications including: Crystal polishing Double side wafer polishing Topside de-processing of layers of metal circuitry for mm..electronic failure analysis and competitive analyses Backside polishing of packaged computer dice for ‘through silicon’ mm..microscopy

Comparison of mechanical & optical parallelism alignment Typical Accuracy of Measurement

Improvement due to optical alignment

Mechanical Indicator

1 to 2 microns

--

ULTRACOLLIMATOR Sample Dia. ≤ 9mm

0.1 microns

10x to 20x

Sample Dia. 9 to 18mm

0.2 microns

5x to 10x

Calibration Measurement Device

Technology Highlights Works in conjunction with tilt controls to control sample cccccccalignment

Improves alignment accuracy up to 20X

Suits topside & backside electronic sample polishing

Suits requirements for double sided polishing

1025 E. Chestnut Ave., Santa Ana, CA 92701 T: 1.714.542.0608 F: 1.714.542.0627 Toll Free (US): 1.877.542.0609

www.ultratecusa.com


Optical Alignment Device

Product Specifications Order Codes

6183.A - ULTRACOLLIMATOR Module to suit ASAP-1 6183.M - ULTRACOLLIMATOR Module to suit MULTIPOL Precision Jigs 6183.U - ULTRACOLLIMATOR Module to suit ULTRAPOL advance Standard Features of modules include: housing with 6 inch lcd screen, controls for beam brightness and cross-hair alignment, and reference flat 6183.A also includes machine vision camera. ULTRACOLLIMATOR microscope is installed in main ASAP-1 polishing unit base. Module is mounted to ASAP-1 main body 6183.M is free-standing also includes a mast and roller bar assembly to fit ULTRA TEC’s precision jigs

Accuracy Power Requirement

Better than 1 minute of arc 90 to 250V AC, 50/60Hz

Key Accessories Order Code

Item Name

Details

6245.1

NTSC to PAL Converter

6184.1

RCA Cable

Stand-alone unit that converts optional output monitor for use in PAL standard locations 6 foot long, Male (both ends of connector) for connecting video equipment

ASAP-1 system with 6183.A ULTRACOLLIMATOR module

MULTIPOL Precision polishing jig positioned on 6183.M ULTRACOLLIMATOR

ULTRAPOL advance system with 6183.U ULTRACOLLIMATOR module

represented in your area by:

ULTRA TEC is proud to operate a continuous product improvement program. Product specification and appearance are subject to modification without prior notification. Many of the techniques employed by the ULTRACOLLIMATOR and discussed here are PATENT PENDING.

1025 E. Chestnut Ave., Santa Ana, CA 92701 T: 1.714.542.0608 F: 1.714.542.0627 Toll Free (US): 1.877.542.0609

www.ultratecusa.com


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