Optical Alignment Device
ENHANCING THE PARALLELISM PERFORMANCE OF POLISHING MACHINERY The new ULTRACOLLIMATOR modules, allow the user to produce the finest results of sample parallelism with both flat lapping and selected area preparation machines. The units produce a ‘single box’ solution, incorporating an lcd screen and all the controls required to align and test the sample. The use of optical alignment allows for simpler faster and significantly more accurate alignment to be achieved on a range of sample types and applications including: Crystal polishing Double side wafer polishing Topside de-processing of layers of metal circuitry for mm..electronic failure analysis and competitive analyses Backside polishing of packaged computer dice for ‘through silicon’ mm..microscopy
Comparison of mechanical & optical parallelism alignment Typical Accuracy of Measurement
Improvement due to optical alignment
Mechanical Indicator
1 to 2 microns
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ULTRACOLLIMATOR Sample Dia. ≤ 9mm
0.1 microns
10x to 20x
Sample Dia. 9 to 18mm
0.2 microns
5x to 10x
Calibration Measurement Device
Technology Highlights Works in conjunction with tilt controls to control sample cccccccalignment
Improves alignment accuracy up to 20X
Suits topside & backside electronic sample polishing
Suits requirements for double sided polishing
1025 E. Chestnut Ave., Santa Ana, CA 92701 T: 1.714.542.0608 F: 1.714.542.0627 Toll Free (US): 1.877.542.0609
www.ultratecusa.com