Full program updated 10 august

WE LOOK FORWARD TO MEETING YOU AT MNE2017 INL - International Iberian Nanotechnology Laboratory Avenida Mestre José Veiga s/n 4715-330 Braga - Portugal

Visit the website and subscribe our newsletter: http://mne2017.org/

Phone: Tel. (351) 253 140 112 Fax: (351) 253 140 119 Email: info@mne2017.org

FULL PROGRAM Monday, Sep 18th CONFERENCE SITE OPENING 9:00 - 18:00

Conference Activities Short Courses

REGISTRATION

Registration and Reception

17:00 - 19:00

Registration

WELCOME

Welcome words from the organization

19:00 - 20:00

Refreshments

THEATRO CIRCO

Tuesday, Sep 19th OPENING

Opening

9:30 - 10:00

Conference opening at Theatro Circo

PLENARY TALK

Plenary talk

10:00 - 10:45

Frank Schuurmans (ASML, The Netherlands) - “The story of ASML – from spin off to a leading semiconductor lithography company”

PERFORMANCE

Performance

10:45 - 11:15

“Sounds and Movements inspired by Nano Engineering” - Theatro Circo

PLENARY TALK

Plenary talk

11:15 - 12:00

Olivier Joubert (CEA-LETI, France) - 20 years celebration talk – “New trends in plasma etching for ultra large scale integration technology”

TRANSFER

Transfer

12:00 - 12:30

Transfer to INL facilities

LUNCH

Lunch

12:30 - 13:30

Lunch at INL

MNE2017

2

Tuesday, Sep 19th SESSIONS 13:30 - 15:00

SESSION 1A

Room A / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes

Sub-topics 1.1. Photon Lithography, 1.2. Electron and Ion Beam Lithography 13:30

Invited - EUV insertion at the N5 node Victor Blanco IMEC, Belgium

SESSION 2A

Room B / Parallel Session

Topic: 3. Micro/Nano Engineering for Physical and

Structures, Devices and Systems

Chemical Applications

Sub-topics: 2.2. Fabrication & Integration of

Sub-topics: 3.4. Optics and Photonics

MEMS/NEMS “Nanocrystalline graphite coatings for lateral silicon MEMS transistors”

“3D metamaterials at optical frequencies”

Jamie Dean Reynolds :: Sunil Rana :: Ting Ying

nae So1 :: Jungho Mun1 :: Rho1 1 - Pohang University of Science and Technology (POSTECH)

1

2

Ling :: Liam Anand Boodhoo :: Suan Hui Puan :: 1

3

Dinesh Pamunuwa2 :: Harold Chong1 1 - University of Southampton; 2 - University of Bristol; 3 - University of Southampton Malaysia Campus

“Wafer-scale Printing of 62nm Line/Space Patterns using a 193 nm ArF Laser” Li Wang1 :: Christian Dais1 :: Francis Clube1 :: Andreas Amrein1 :: Harun Solak1 1Eulitha AG, 5416 Kirchdorf, Switzerland

Inki Kim1 :: Gwanho Yoon1 :: Minkyung Kim1 :: Su-

“Fabrication and Characterization of a Hammer-Shaped BEOL-Embedded CMOS-Nanoelectromechanical Relay”

“Mapping Photoemission and Hot-Electron Emission from Plasmonic Nanoantennas”

Martin Riverola1 :: Arantxa Uranga1 :: Francesc

:: Yujia Yang2 :: Franz Kärtner3 :: Karl Berggren2 1 - Trinity College Dublin; 2 - Massachusetts Institute of Technology; 3 - Center for Free-Electron Laser Science, Deutsches Elektronen-Synchrotron, Hamburg, Germany

Torres1 :: Nuria Barniol1 1 - Universitat Autònoma de Barcelona

14:00

Room C / Parallel Session

Topic: 2. Fabrication and Integration of Micro/Nano

3

13:45

SESSION 3A

Invited - “Conformal nanogaps fabricated by cleavage of single-crystal silicon on MEMS” Toshiyuki Tsuchiya Kyoto University, Japan

Richard Hobbs1 :: William Putnam2 :: Arya Fallahi3

“Photothermal probing of metallic nanoparticles on nanomechanical string resonators to study plasmonic heating effects” Varadarajan Padmanabhan Rangacharya1 :: Kaiyu Wu1 :: Peter Emil Larsen1 :: Tomas Rindzevicius1 :: Anja Boisen1 MNE2017

3

Tuesday, Sep 19th 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Technical University of Denmark 14:15

“A novel method to find the best (iso-focal) process point in electron beam lithography” Ulrich Hofmann1 :: Nezih Ünal1 :: Safak Sayan2 :: Gerald Lopez3 1GenISys GmbH; 2IMEC; 3University of Pennsylvania

“RF characterisation of CMOS-compatible Silicon-on-Insulator Nanoelectromechanical Resonators” Yoshishige Tsuchiya1 :: Naoaki Harada1,2 :: Christos Giotis1 :: Joshua Lamb1 :: Faezeh Arab Hassani1 :: Mitsuhiro Shikida2 :: Cecilia Dupre3 :: Eric Ollier3 :: Sebastian Bartsch4 :: Adrian Mihai Ionescu4 :: Hiroshi Mizuta1,5 1 - Naonelectronics and Nanotechnology Research Group, Department of Electronics and Computer Science, University of Southampton; 2 - Hiroshima City University; 3 - CEA-Leti; 4 EPFL; 5 - JAIST

14:30

“Free-standing metasheets with opposite side metasurfaces by transmitted electron beam lithography” Bing-Rui Lu1 :: Jianan Deng1 :: Yifang Chen1 :: 1 - Nanolithography and Application Research Group, State key lab of Asic and System, School of Information Science and Engineering, Fudan

“Novel magnetic sensing principle for MEMS displacement readout” Rosana Dias1; Eurico E. Moreira2; S. Cardoso3; Paulo P Freitas1; Luis A. Rocha2; Joao Gaspar1 1 - INL-International Iberian Nanotechnology Laboratory; 2 - CMEMS, Universidade do Minho; INESC MN, Lisbon

“Photothermal analysis of direct-write purified gold nanostructures with nanomechanical resonator” Mostafa Moonir Shawrav1,2; Miao-Hsuan Chien1; Philipp Taus2,3; Heinz D. Wanzenboeck2; Emmerich Bertagnolli2; Silvan Schmid1 1 - Micro and Nanosensors Group, Institute of Sensors and Actuator Systems, TU WIEN; 2 - Bionanobeam Group, Institute of Solid State Electronics, TU WIEN; 3 - Institute of Science and Technology

Invited - “Vacuum Rabi splitting in a plasmonic cavity at the single quantum emitter limit” Ora Bitton Weizmann Institute, Israel

University, Shanghai 14:45

“Review of functional silicon nanostructures defined by focused ion beam implantation” Jordi Llobet1 :: Christian Pinto-Gómez2 :: Xavier MNE2017

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Tuesday, Sep 19th 14:45

Borrisé3; Francesc Pérez-Murano2 1 - International Iberian Nanotechnology Laboratory; 2 - Institute of Microelectronics of Barcelona; 3 - Catalan Institute of Nanoscience and Nanotechnology & The Barcelona Institute of Science and Technology

POSTER

Poster

15:00 - 15:15

Invited Poster Pitch 1 - 10 posters

COFFEE BREAK

Coffee Break

15:15 - 17:00

Coffee Break / Exhibition Poster Session 1

SESSIONS 17:00 - 18:30

17:00

SESSION 1B Room A / Parallel Session

SESSION 2B Room A / Parallel Session

SESSION 4A Room A / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrica-

Topic: 2. Fabrication and Integration of Micro/Nano

tion Methods and Processes

Structures, Devices and Systems

Sub-topic: 1.3. Nanoimprint Lithography and

Sub-topic: 2.2. Fabrication & Integration of

Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topic: 4.1. Bio-Inspired Technologies, 4.2. Bio-Mimetic Surfaces

Replication Methods

MEMS/NEMS

“Wafer-Level Nanoimprint Lithography towards Single Nanometer Resolution” Thomas Glinsner1; Martin Eibelhuber1; Dominik Treiblmayr1; Barbara Schamberger1; Mustapha Chouiki1; Claudia Lenk2; Yana Krivoshapkina2; Martin Hoffmann2; Steve

Invited - “Fabrication of piezoelectric actuators with a pure twisting response” David Elata Israel Institute of Technology, Israel

“Single step fabrication and loading of biopolymer microcontainers for oral drug delivery” Zarmeena Abid1; Ritika Singh Petersen1; Stephan Sylvest Keller1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug MNE2017

5

Tuesday, Sep 19th Lenk2; Ivo Rangelow2 1 - EVGroup; 2 - TU Ilmenau

Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Technical University of Denmark

17:15

“Fabrication of Dual-Scale Nanoimprint Molds Using Polymer Stencil Membranes” Junseo Choi1; Sunggook Park1 1 - Louisiana State University

“Soft nanometer-thin membranes based on entangled PDMS for tissue-like foldable bioelectronics” Töpper Tino1; Siketanc Matej1; Osmani Bekim1; Lörcher Samuel1; Müller Bert1 1 - University of Basel

17:30

“Fabrication of UV resin stamps from sharp nanostructures and their performance for thermal NIL” Zheng Jia1; Junseo Choi1; Sunggook Park1 1 - Louisiana State University

“Fabrication of air-filled waveguide filter with pillar array using 3D printing and MEMS copper-plating method” Yeonsu Lee1; Sung-Min Sim1; Hye-Lim Kang1; Fermin Mira2; Ignacio Llamas-Garro2; Yi Wang3; Yun-Ho Jang4; Jung-Mu Kim1 1 - Chonbuk National University; 2 - Centre Tecnològic de Telecomunicacions de Catalunya; 3 - University of Greenwich; 4 - Microfluidics for all, Inc.

“Maskless Exposure System Compatible with Nozzle Array and Optical Microscope for 3D Parallel Single-Cell Assembly” Shota Hiratsuka1; Sho Kawaharada1; Shogo Sato1; Takayuki Shibata1; Moeto Nagai1 1 - Toyohashi University of Technology

17:45

”μ-R2R: Fabrication of seamless microstructured tools for multi-material replication” Andreas Striegel1; Norbert Schneider1; Marc Schneider1; Matthias Worgull1 1 - Karlsruhe Institute of Technology, Institute of Microstructure Technology

“Self-folding process for integrated 3D structures in complex microsystems” José Fernandes1; Luís Rocha1; Paulo Mendes2; João Gaspar1 1 - INL; 2 - UMinho

“Multi-photon Direct Laser Writing and 3D imaging of Free-standing 3D Architectures for Cell Colonization” Angelo Accardo1; Marie-Charline Blatche1; Remi Courson1; Isabelle Loubinoux2; Christophe Thibault1; Laurent Malaquin1; Christophe Vieu1 1 - LAAS-CNRS; 2 - TONIC-INSERM

18:00

“Mold-based replication methods for integrated polymer micro-manufacturing: an opportunity for organ-on-chip systems” Paola Fanzio1; Pieter Kapel1; Luigi Sasso1

“Development of a MEMS Loudspeaker or ‘The Role of Luck in MEMS development” Shay Kaplan AudioPixels, Israel

“Study of stability and bioactivity of bevacizumab-loaded PLGA nanoparticles towards its controlled release” Flávia Sousa1; Andrea Cruz2; Teresa Neves-PeMNE2017

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Tuesday, Sep 19th 1 - Delft University of Technology, Dept. of Precision and Microsystems Engineering

tersen3; Inês Mendes Pinto2; Bruno Sarmento1 1 - I3s, instituto de investigação e inovação em saúde; 2 - INL; 3 - Aalborg University

18:15

“Nanoimprint enabled dynamic surfaces: tailoring the wetting properties of amphiphobic surfaces” Ariadna Fernandez1; Achille Francone1; Markus Guttmann3; Clivia M. Sotomayor Torres2; Nikolaos Kehagias1 1 - Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and The Barcelona Institute of Science and Technology, UAB; 2 - ICREA, Institució Catalana de Recerca i Estudis Avançats; 3 - Karlsruhe Institute of Technology (KIT)

“2D Microscale Engineering and Gradient Deposition of Novel Protein based Nanoparticles for Cell Guidance” Witold Tatkiewicz1; Joaquim Seras-Franzosob2; Adriana Kyvic1; Elena García-Fruitós2; Esther Vazquez2; Antoni Villaverde2; Jaume Veciana1; Imma Ratera1 1 - Institut de Ciència de Materials de Barcelona (ICMAB-CSIC)/CIBER-BBN; 2 - 3Institut de Biotecnologia i de Biomedicina (IBB), Universitat Autònoma de Barcelona/ CIBER-BBN

18:30

“The 2017 EIPBN Best overall Poster - Thermal nanoimprinting of mid-IR antireflective moth-eye nanostructures on chalcogenide glass windows” M. R. Lotz1, M. H. Jakobsen1, R. J. Taboryski1 1 - DTU Nanotech, Technical University of Denmark

18:30

Projects

Tours

European projects and platforms

Lab tours to INL flagship facilities Refreshments

19:00

Special Session NFFA Special Session

20:00 20:30 MNE2017

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Wednesday, Sep 20th PLENARY TALK

Plenary Talk

9:00 - 9:45

Goran Stemme (KTH, Sweden) - 10 years celebration talk – “MEMS technology for medical applications”

PLENARY TALK

Plenary Talk

9:45 - 10:30

Mark Hutchinson (CNBP, Australia) - “The Importance of Knowing You are Sick: Nanoscale Biophotonics For The ‘Other’ Brain”

COFFEE BREAK

Coffee Break

10:30 - 11:00

Coffee Break / Exhibition

SESSIONS

SESSION 1C Room A / Parallel Session

SESSION 3B

Topic: 1. Novel Developments in Nano/Micro Fabrica-

Topic: 3. Micro/Nano Engineering for Physical and

tion Methods and Processes

Chemical Applications

Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics: 4.3. Micro and Nano Fluidic Systems

Sub-topics: 1.5. Pattern Transfer

Sub-topics: 3.4. Optics and Photonics

and Their Fabrication,

11:00 - 12:30

Room B / Parallel Session

SESSION 4B

Room C / Parallel Session

4.4. Applications of Micro and Nano Engineeried Fluidic Systems for Life Sciences 11:00

“Functional nanostructured silicon surfaces fabricated by block-copolymer nanolithography” Agnieszka Telecka1; Tao Li1; Sokol Ndoni1; Rafael Taboryski1 1 - Technical University of Denmark

“Photosynthetic photonic crystals structures in plants, lessons for light harvesting devices” Martin Lopez-Garcia1; Matt Jacobs2; O.-P Phrathep2; Tracy Lawson3; Ruth Oulton4; Heather Whitney2 1 - International Iberian Nanotechnology Laboratory; 2 - School of Biological Sciences, University of Bristol (UK); 3 - School of Biological Sciences, University of Essex (UK); 4 - Department of Elect.& Electro. Engin., Univ. of Bristol (UK)

Invited - “Micro/nano devices and systems for biofilm exploration and eradication” Reza Ghodssi University of Maryland, USA

MNE2017

8

Wednesday, Sep 20th 11:15

“Scaling up nanoxerography by electrical micro-contact printing for photoluminescent anti-counterfeiting solutions” David Poirot1; Etienne Palleau1; François Guérin1; Thomas Alnasser1; Laurence Ressier1 1 - Université de Toulouse, LPCNO

“Aluminium plasmonics: SERS substrates made of structured polymers and aluminium for detection of early degradation products in modern and contemporary artworks” Manuel Gomez1; Massimo Lazzari1 1 - CIQUS, Research Center for Biological Chemistry and Molecular Materials, Santiago de Compostela University

11:30

“Design, characterization and lithographic application of Si nanocrystals patterns via templated dewetting” Monica Bollani1; Marco Salvalaglio2; Mario Lodari1; Meher Naffouti13; Rainer Backofen2; Thomas Bottein3; Alex Voigt2; Thomas David3; Abdelmalek Benkouider3; Luc Favre3; Antoine Ronda3; Isabelle Berbezier3; Marco Abbarchi3 1 - IFN-CNR; 2 - TU Dresden; 3 - IM2NP -CNRS

“Switching single quantum dot emission in nanophotonic integrated circuits” Leonardo Midolo1; Sofie Lindskov Hansen1; Weili Zhang2; Camille Papon1; Rüdiger Schott3; Arne Ludwig3; Andreas Wieck3; Peter Lodahl1; Søren Stobbe1 1 - Niels Bohr Institute, University of Copenhagen; 2 - Key Laboratory of Optical Fiber Sensing and Communications (Education Ministry of China), University of Electronic Science and Technology of China; 3 - Lehrstuhl für Angewandte Festkörperphysik, Ruhr-Universität Bochum

“A microfluidic-integrated nanopore array for chemical stimulation and electrophysiology of cells” Peter D. Jones1,2; Dieter P. Kern2; Martin Stelzle1 1 - NMI Natural and Medical Sciences Institute at University of Tübingen, Reutlingen, 72770, Germany; 2 - Institute for Applied Physics, University of Tübingen, Tübingen, 72076, Germany

11:45

“Aluminium micromachining in phosphoric acid via through-mask electrochemical micromachining” Tobias Baldhoff1; Volker Nock2; Aaron T. Marshall1 1 - Department of Chemical and Process Engineering, University of Canterbury; 2 - Department of Electrical and Computer Engineering, University of Canterbury

“InGaN-based Nanocolumn Photonic Crystal LEDs Fabricated by Nanotemplate Selective Area Growth” Katsumi Kishino1; Yuzo Matsui1; Jun Yoshida1; Takao Oto1; Koji Yamano1 1 - Sophia University

“A nanofiltration technique for analyte extraction from complex matrix and surface enhanced Raman spectroscopy based sensing” Onur Durucan1; Tomas Rindzevicius1; Michael Stenbaek Schmidt1; Oleksii Ilchenko1; Anja Boisen1 1 - Technical University of Denmark

MNE2017

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Wednesday, Sep 20th 12:00

Invited - “OSTEMERs – New opportunities for micro- and nanostructuring” Wouter van der Wijngaart KTH Royal Institute of Technology, Sweden

12:15

“Fabrication of chip-scale single-photon sources for quantum technologies Søren Stobbe1; Leonardo Midolo1; Irina Kulkova2; Tommaso Pregnolato1; Nicolas Taba1; Toke Lund-Hansen2 1 - Niels Bohr Institute, University of Copenhagen; 2 - Sparrow Quantum A/S

“Fabrication of solid-state nanoporous membranes made of amorphous carbon and SiO2 with high aspect-ratio nanopores” Stefano Varricchio1; Arnaud Bertsch1; Philippe Renaud1 1 - École Polytechnique Fédérale de Lausanne EPFL

“InGaAs/GaAs multi-quantum-well core-shell nanowires for optoelectronic applications” Suzanne Lancaster1; Donald Macfarland1; Mattia Capriotti1; Aaron Maxwell Andrews1; Werner Schrenk1; Gottfried Strasser1; Hermann Detz2 1 - TU Wien; 2 - Austrian Academy of Sciences

“Microfluidic Reactors for Nanotechnology: Highly Controlled Synthesis of Spiky Gold Nanoparticles in Microdroplets” Sara Abalde-Cela3,4; Patricia Taladriz-Blanco1,2; Chris Abell3 1 - Univ Estadual Campinas, UNICAMP; 2 - Institut für Mikrotechnik (IMT); 3 - Department of Chemistry, University of Cambridge; 4 - International Iberian Nanotechnology Laboratory (INL)

SESSION 4C

LUNCH

Lunch

12:30 - 13:30

Lunch at INL

SESSIONS

SESSION 2C Room A / Parallel Session

SESSION 3C

Topic: 2. Fabrication and Integration of Micro/Nano

Topic: 3. Micro/Nano Engineering for Physical and

Topic: 4. Micro/Nano Engineering for the Life Scienc-

Chemical Applications

es

Sub-topics: 3.2. Energy

Sub-topics: 4.3. Micro and Nano Fluidic Systems

13:30 - 15:00

Structures, Devices and Systems

Sub-topics: 2.1. Fabrication & Integration of Micro/Nano Electronic Devices

Room B / Parallel Session

Room C / Parallel Session

and Their Fabrication,

4.4. Applications of Micro and Nano Engineeried Fluidic Systems for Life Sciences

MNE2017

10

Wednesday, Sep 20th 13:30

Invited - “Engineering and Processing of 10 nm 3D structures for FET applications” Lars-Erik Wernersson Lund University, Sweden

13:45

“Micro Solid Oxide Fuel Cells, towards a new generation of miniaturized portable power sources” Nerea Alayo1; Tammy Leung1; Iñigo Garbayo1; Francesco Chiabrera1; Marc Salleras2; Alex Morata1; Luis Fonseca2; Albert Tarancón1 1 - IREC (Institut de Recerca en Energia de Catalunya); 2 - Institut de Microelectrònica de Barcelona (IMB-CNM, CSIC)

“Modeling the pre-invasive breast cancer microenvironment using high-throughput microfluidic cell encapsulation” Jelle Jan Freerk Sleeboom1,2,3; Cecilia M. Sahlgren2,3,4; Jaap M. J. Den Toonder1,3 1 - Microsystems, Eindhoven University of Technology; 2 - Soft Tissue Engineering & Mechanobiology, Eindhoven University of Technology; 3 - Institute for Complex Molecular Systems, Eindhoven University of Technology; 4 - Åbo Akademi University, Finland

“One-Step Anodization Synthesis of Ti-Nb-Ta-Zr-O Nanotubes Arrays for Photoelectrochemical Water Oxidation” Yi-Hsuan Chiu1,2; Chun-Yi Chen1,3; Mitsuo Niinomi4; Tso-Fu Mark Chang1,3; Yung-Jung Hsu2; Nobuhiro Matsushita1; Masato Sone1,3 1 - Tokyo Institute of Technology, Japan; 2 - National Chiao Tung University, Hinschu, Taiwan; 3 - CREST JST, Japan; 4 - Tohoku University, Japan

“Lab on-Chip for Bacteria Capture, Lysis and DNA Amplification Addressing Foodborne Pathogens” 1; Georgia Kaprou2; Angeliki Tserepi1; Evangelos Gogolides1 1 - Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”; 2 - Nanoplasmas P.C. Τechnology Park “Lefkippos”, NCSR “Demokritos”; 2 - Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”

14:00

“Room Temperature Double Quantum Dots in Silicon Point-Contact SETs” Zahid Durrani1; Mervyn Jones1; Chen Wang1; Dixi Liu1; Vlad-Petru Veigang-Radulescu1; Jonathan Griffiths2 1 - Imperial College London; 2 - University of Cambridge

“Novel fabrication method of highly porous polymer-based triboelectric nanogenerators via microwave irradiation” Shin Jang1; Samgon Lee1; Je Hoon Oh1 1 - Hanyang University

“A Lab-in-a-foil microfluidic reactor based on phaseguiding” Eriksen Johan1; Julien Schira2; Nadine Vincent2; Celine Sabatel3; Anders Kristensen1; Rodolphe Marie1 1 - DTU Nanotech, Technical University of Denmark; 2 - Fasteris SA, Switzerland; 3 - Diagenode SA, Belgium

14:15

“Room-temperature single electron transistors fabricated by field-emission scanning probe lithogra-

“Magnetoelastic Vibrational Energy Harvester with Enhanced Robustness”

“Automated rolling circle amplification and optomagnetic product detection in an injection molded MNE2017

11

Wednesday, Sep 20th phy and cryogenic plasma etching” Claudia Lenk1; Marcus Kaestner1; Yana Krivoshapkina1; Diana Nechepurenko1; Martin Hofmann1; Burkhard Volland1; Tzvetan Ivanov1; Steve Lenk1; Mathias Holz2; Ahmad Ahmad1; Tihomir Angelov1; Ivaylo Atanasov1; Alexander Reum1; Zahid Durrani3; Mervyn Jones3; Chen Wang3; Dixi Liu3; Ivo Rangelow1 1 - Dept. Micro- und Nanoelectronic Systems, Technische Universität Ilmenau; 2 - Nano Analytik GmbH; 3 - Department of Electrical and Electronic Engineering, Imperial College London

Lucia R. Alcala Jimenez1; Thommas Passer Jensen1; Erik V. Thomsen1 1 - DTU Nanotech

all-polymer chip – Optimization of amplification temperature” Francesca Garbarino1; Gabriel Khose Antonio Minero1; Jeppe Fock1; Giovanni Rizzi1; Felix Neumann2; Narayanan Srinivasan2; Pavan Asalapuram2; Mats Nilsson2; Mikkel Fougt Hansen1 1 - Technical University of Denmark; 2 - Stockholm University

14:30

“Protective molecular passivation of black phosphorous” Vlada Artel1; Qiushi 2; Raimond Gasper3; Hagai Cohen5; Ashwin Ramasubramaniam4; Fengnian Xia2; 6 1 - Faculty of Engineering, Bar-Ilan University, Israel; 2 - Department of Electrical Engineering, Yale University; 3 - Department of Chemical Engineering, University of Massachusetts; 4 - Department of Mechanical and Industrial Engineering, University of Massachusetts; 5 - Department of Chemical Research Support, Weizmann Institute of Science, Israel; 6 - Faculty of Engineering, BarIlan University, Ramat-Gan, Israel

Invited - “Micro energy conversion and storage based on nanomaterials” Xiaohong Wang Tsinghua University, China

“Single-cell trapping by passive pumping using NOA81 replica molded stencils” Emma Moonen1; Regina Luttge1; Jean-Philippe Frimat1 1 - Microsystems, Department of Mechanical Engineering, Eindhoven University of Technology

14:45

“Ion Beam Planarization techniques optimized for the nanofabrication of Magnetic Tunnel Junction Nanopillar Devices” Mohammad Tarequzzaman1; Leandro Martins2; Jose Diogo Costa1; Jerome Borme1; Francis

“An optimized droplet split designed for acoustic intra-droplet particle enrichment” Anna Fornell1; Mathias Ohlin2; Johan Nilsson1; Maria Tenje2 1 - Lund University; 2 - Uppsala University MNE2017

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Wednesday, Sep 20th Leonard Deepak1; Elvira Paz1; João Ventura2; Ricardo Ferreira1; Paulo Freitas1 1 - INL-International Iberian Nanotechnology Laboratory (INL); 2 - IFIMUP-IN, Porto POSTER

Poster

15:00 - 15:15

Invited Poster Pitch 2 - 10 posters

COFFEE BREAK

Coffee Break

15:15 - 17:00

Coffee Break / Exhibition Poster Session 2

SESSIONS 17:00- 18:30

SESSION 1D

Room A / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrica-

WORKSHOP

Room B / Parallel Session

Workshop

SESSION 4D

Room C / Parallel Session

Topic: 4. Micro/Nano Engineering for the Life

tion Methods and Processes

Sciences

Sub-topics: 1.6. Resists and Materials

Sub-topics: 4.5. Design and Fabrication of Micro/Nano Devices for Life Sciences: Biosensors, Prosthesis

17:00

“Cr2O3 – A New and Flexible Material for Nanofabrication” J. Alexander Liddle1; B. Robert Ilic1; Christopher Ray1; Kerry Seibein1 1 - Center for Nanoscale Science and Technology, National Institute of Standards and Technology

17:00

“Atlas 46 – novel negative tone photoresist which combines the good properties of the established SU-8 and CAR 44” Tobias Mai1; Matthias Schirmer1; Georg Schmidt2; Maik Gerngroß1; Frank Syrowatka3;

“Scientific Communication in Society” Elisabeth Nilsson (Lund University)

“Effect of water-DNA interactions on elastic properties of DNA self-assembled monolayers” Daniel Ramos1; Carmen M. Dominguez1; Javier Tamayo1; Montserrat Calleja1 1 - CSIC

“Miniaturized localized surface plasmon resonance shift sensor integrated on a gradient index lens in a microfluidic channel” Andreas Horrer1; Jonas Haas1; Dieter P. Kern1; MNE2017

13

Wednesday, Sep 20th Katrin Lehmann2 1 - Allresist GmbH; 2 - Institut für Physik, Martin-Luther Universität Halle-Wittenberg; 3 - Interdisziplinäres Zentrum für Materialwissenschaften, Martin-Luther Universität Halle-Wittenberg

Monika Fleischer1 1 - Institute for Applied Physics, Eberhard Karls University Tübingen, Germany

W orkshop: “Scientific Communication in Society” Elisabeth Nilsson (Lund University)

17:30

“Organic ice resists: condensed small molecules as spin-free volatile e-beam resists” William Tiddi1; Hoa Thanh Le1; Anna Elsukova1; Marco Beleggia1; Anpan Han1 1 - DTU Danchip-CEN, Technical University of Denmark

“Microcontainers for oral vaccine delivery” Line Hagner Nielsen1; Christoffer Von Halling Laier1; Zarmeena Abid1; Stephan Sylvest Keller1; Anja Boisen1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Department of Micro- and Nanotechnology, Technical University of Denmark

17:45

“Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning” Boon Teik Chan1; Jean-François De Marneffe1; Martin Spieser2; Armin Knoll3; Werner Knaepen4 1 - imec; 2 - SwissLitho AG; 3 - IBM Research Zurich; 4 - ASM International

“Rapid micro fluorescence in situ hybridization for chromosomal interrogation of tissues“ Deborah Huber1; Nadya Ostromohov2; Govind V. Kaigala1 1 - IBM Research Zurich; 2 - Technion – Israel Institute of Technology

18:00

Invited - “Amphiphilic polymeric networks as a tool for the design of new functional materials” Cristina Hoppe INTEMA, Argentina

“Split ring resonators for detection of circulating tumor cells through variation of capacitive properties” Angelo Leo1,2; Anna Grazia Monteduro3; Maria Serena Chiriacò2; Elisabetta Primiceri2; Giuseppe Maruccio1,2 1 - Dipartimento di Matematica e Fisica, Università del Salento; 2 - CNR Nanotec - Istituto di Nanoscienze; 3 - IRCCS de Bellis MNE2017

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Wednesday, Sep 20th “Stretched polycarbonate nanopillars for high efficient capture of bladder epithelial cancer cells” Yi-Jui Chen1; Yi-Chun Chiu2; Shang-Hui Yu1; Chih-Chia Huang1; Chun-Hung Lin1; Wen-Huei Chang3 1 - Department of Photonics, National Cheng Kung University; 2 - Division of Urology, Department of Surgery, Zhong Xiao Branch, Taipei City Hospital; 3 - Department of Applied Chemistry, National Pingtung University

17:30

BREAK

Break

18:30 - 18:45

Break

TRANSFER

Transfer to Conference Dinner Location

18:45 - 20:00

Transfer from INL to Conference Dinner Location

CONFERENCE

Conference Dinner

DINNER

Conference Dinner at Real Companhia Velha (V.N. Gaia)

20:00- 22:45

Incl. announcement of poster and µngraph awards

TRANSFER

Transfer from Dinner Location

22:45- 23:45

Transfer from Dinner Location

MNE2017

15

Thursday, Sep 21st PLENARY TALK

Plenary Talk

9:00 - 9:45

Andreas Manz (KIST Europe, Germany) - MNE fellow recipient – “Lab on chip” – biomimetic channel networks

SESSIONS

SESSION 1E Room A / Parallel Session

SESSION 2D

Topic: 1. Novel Developments in Nano/Micro Fab-

Topic: 2. Fabrication and Integration of Micro/Nano

rication Methods and Processes

Structures, Devices and Systems

Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics 4.6: Interfacing Biomaterials and

Sub-topics 1.6: Resists and Materials

Sub-topics 2.1: Fabrication & Integration of

Bio-Entities with Devices and Systems

9:45 - 10:30

Room B / Parallel Session

SESSION 4E

Room C/ Parallel Session

Micro/Nano Electronic Devices 9:45

“Direct Patterning of Functional Zinc Sulfide on a Sub-10 nm Scale via Electron Beam Lithography” Mohammad S. M. Saifullah1; Mohamed Asbahi1; Maryam Binti-Kamran Kiyani1; Sudhiranjan Tripathy1; Esther A. H. Ong2; Asadullah Ibn Saifullah3; Hui Ru Tan1; Tanmay Dutta4; Ramakrishnan Ganesan5; Suresh Valiyaveettil2; Karen S. L. Chong1 1 - Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology, and Research); 2 - Department of Chemistry, National University of Singapore; 3 - Hills Road Sixth Form College, Cambridge; 4 - Department of Electrical and Computer Engineering, National University of Singapore; 5 - Department of Chemistry, Birla Institute of Technology & Science, Pilani, India

“Practical steps towards wafer-scaled III-V vertical FETs fabrication by means of plasma etching” Alexey Milenin1; Anabela Veloso1; Nadine Col-

“Invited - Computation with biological agents” Dan Nicolau McGill University, Canada

laert1; Daniele Piumi1 1 - IMEC

MNE2017

16

Thursday, Sep 21st 10:00

10:15

“Healing effect of controlled anti-electromigration on conventional and high-Tc superconducting nanowires” Xavier D. A. Baumans1; Joseph Lombardo1; Jérémy Brisbois1; Shaw Gorky1; Vyacheslav S. Zharinov2; Ge He3; Heshan Yu3; Jie Yuan3; Beiyi Zhu3; Kui Jin3; Roman B. G. Kramer4,5; Joris Van De Vondel2; Alejandro V. Silhanek1 1 - Experimental Physics of Nanostructured Materials, Q-MAT, CESAM, Université de Liège; 2 - INPAC – Institute for Nanoscale Physics and Chemistry, Department of Physics and Astronomy, K. U. Leuven, Belgium; 3 - National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences, China; 4 - Université Grenoble Alpes, Institut NEEL; 5 CNRS, Institut NEEL, Grenoble

“Exploring strategies to contact 3D nano-pillars below 100 nm”

“Investigation of the protective coating Electra 92 for electron-beam lithography on dielectrics” Katharina Goth1; Aina Quintilla1; Silvia Diewald1; Gernot Goll1 1 - Center for Functional Nanostructures – Nanostructure Service Laboratory (CFN-NSL), Karlsruhe Institute of Technology (KIT), Germany

“Self-aligned Gate-last Process for Quantum-well InAs Transistor on Insulator”

“Nanofabrication of Bacterial Biocomputation Networks”

Qi Cheng1; Zilun Wang1; Kazy Shariar1; Sufi Md

Falco Van Delft1; Anja Van Langen-Suurling2;

Abu1; Sourabh Khandelwal2; Yuping Zeng1

Charles De Boer2; Frank Dirne2; Ayyappasamy

1 - University of Delaware; 2 - Macquarie

Sudalaiyadum Perumal3; Sara Kheireddine3; Saba

University

Roozbahani3; Viola Tokárová3; Ondřej Kašpar3;

Esteve Amat1; Marta Fernandez-Regulez1; Laura Evangelio1; Ahmed Gharbi2; Cyrille Laviron2; Joan Bausells1; Francesc Perez-Murano1 1 - IMB-CNM; 2 - CEA-Leti

Dan Nicolau3 1 - Nanovalk, Valkenswaard; 2 - Kavli Nanolab, Delft; 3 - McGill University, Montreal

COFFEE BREAK

Coffee Break

10:30 - 11:00

Coffee Break / Exhibition

MNE2017

17

Thursday, Sep 21st SESSIONS 11:00 - 12:30

SESSION 2E Room A / Parallel Session

SESSION 3D

Topic: 2. Fabrication and Integration of Micro/Nano

Topic: 3. Micro/Nano Engineering for Physical and

Structures, Devices and Systems

Sub-topics 2.3: Inspection, Process Control &

Room B / Parallel Session

Chemical Applications

Sub-topics 3.3: Physical and Chemical Sensors

SESSION 4F

Room C / Parallel Session

Topic: 4. Micro/Nano Engineering for the Life Sub-topics: 4.5. Micro/Nano Devices for Life Sciences: Biosensors, Prosthesis;

4.6. Interfacing Biomaterials and Bio-Entities

Manufacturing Testing

with Devices and Systems “Laterally resolved in-situ 4D topography of electrochemical etching by Digital Holographic Microscope” Shenqi Xie1; P.-F. Chauvy2; Jerome Parent1; Yves Emery1 1 - Lyncée Tec SA, Lausanne; 2 - Micropat SA, Lausanne

“Collective nano-optomechanics for sensing applications” Eduardo Gil-Santos1; William Hease2; Aristide Lemaitre3; Labousse2; Cristiano Ciuti2; Ivan Favero2 1 - Instituto de Microelectronica de Madrid; 2 Universite Paris Diderot; 3 - Centre de Nanosciences et Nanotechnologies

11:15

“Advanced defect classification by optical metrology” Paul Alkemade1; Esther Kramer1; Silvania Pereira1; Peter Van Der Walle2; Wouter Mulckhuyse2; Jacqueline Van Veldhoven2; Loek Nijsten2; Anton De Jong2; Christiaan Hollemans2; Elfi Van Zeijl2; Helma Spruit2; Emile Van Veldhoven2; Jacques Van Der Donck2; Felipe Bernal Arango2; Diederik Maas2 1 - Delft University of Technology; 2 - TNO

“Effect of varying gate distance on the threshold voltage shift in carbon nanotube field effect transistor gas sensors” Sebastian Eberle1; Cosmin Roman1; Christofer Hierold1 1 - ETH Zürich, D-MAVT, Micro- Nanosystems

11:30

“3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB” Takeyoshi Ohashi1; Atsuko Yamaguchi1; Kazuhisa Hasumi2; Masami Ikota2; Chi Lim Tan3; Tom

“Hysteresis characteristics of nanoFET sensor with a floating gate by the sweep of backgate voltage” Kook-Nyung Lee1; Sumi Yoon1; Dong-Ki Hong1;

11:00

Invited - “How to interface the brain with MEMSbased implants” Patrick Ruther University of Freiburg, Germany

“High density, multifunctional neural probes for massively parallel read out and control” Vittorino Lanzio4; Stefano Cabrini4; Simone SasMNE2017

18

Thursday, Sep 21st Raymaekers3; Geert Van Den Bosch3; Arnaud Furnémont3; Gian Lorusso3 1 - Hitachi, Ltd.; 2 - Hitachi High-Technologies Corporation; 3 - imec

In-Bok Jung1; Yung-Jae Won1; Wookyeong Seong1 1 - Korea Electronics Technology Institute (KETI)

solini4; Melanie West4; Scott Dhuey4; Alexander Koshelev1; Paolo Micheletti4; Raquel Lambert4; Hillel Adesnik2; Gregory Telian2; Peter Denes3 1 - A Beam Technologies; 2 - UC Berkeley, Life Sciences; 3 - ALS, Lawrence Berkeley National Laboratory; 4 - Molecular Foundry, Lawrence Berkeley National Laboratory

11:45

“Extracting Height Information from Top-Down SEM Images through Monte-Carlo Simulation” Kerim T. Arat1; Cornelis W. Hagen1; Jens Bolten2; Nezih Ünal3 1 - Delft University of Technology; 2 - AMO GmbH; 3 - GenISys GmbH

“Highly sensitive GaN based hydrogen sensors using nanostructure sensing materials” Sunwoo Jung1; Kwang Hyeon Baik2; Fan Ren3; Stephen Pearton3; Soohwan Jang1 1 - Dankook University; 2 - Hongik University; 3 University of Florida

“Direct Laser Writing of tapered optical fibers for spatial selective control of neural activity” Alessandro Rizzo1; Enrico Domenico Lemma1; Leonardo Sileo1; Marco Pisanello1; Filippo Pisano1; Massimo De Vittorio1; Ferruccio Pisanello1 1 - Instituto Italiano di Tecnologia (IIT), Center for Biomolecular Nanotechnologies

12:00

12:15

“Establishing Nanoimprint Lithography on an Industrial Level” Hubert Teyssedre1; Martin Eibelhuber2; Stefan Landis1; Sandra Bos1; Laurent Pain1; Marie Laure2; Jonas Khan2; Christine Thanner2; Gerald Mittendorfer2; Markus Wimplinger2 1 - CEA-LETI; 2 - EV Group E.Thallner GmbH, Austria

“The 2017 EIPBN Best Invited Poster - Aberration-Corrected Quantum Electron Microscopy” M. Turchetti, C-S. Kim, R. G. Hobbs, N. Abedzadeh, K. K. Berggren Research Laboratory of Electronics, Massachusetts Institute of Technology

“Lithography-free gold capped fused silica nanostructures as dual functionality sensor for electrochemical and SERS based detection” Kuldeep Sanger1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Department of Micro- and Nanotechnology, Technical University of Denmark

“Brain-inspired nano-optoelectronic circuits for

“FM accelerometer design based on thermal-piezoresistive amplification” Cláudia Coelho1,2; João Gaspar2; Luís Rocha1,2 1 - CMEMS-UM, University of Minho; 2 - International Iberian Nanotechnology Laboratory

“o-Phenylenediamine-based Molecularly Imprinted

neuromorphic computing” Bruno Romeira1; Julien Javaloyes2,3; José Figueiredo1 1 - Center for Electronics Optoelectronics and Telecomunications (CEOT), Department of Physics, Universidade do Algarve, Campus de Gambelas, 8005-139, Faro, Portugal; 2 - ; 3 - Departament de Física, Universitat de les Illes Baleares

Layer for Multi-Analyte Neurotransmitter Sensing” Bo Si1; Edward Song1 1 - University of New Hampshire MNE2017

19

Thursday, Sep 21st LUNCH

Lunch

12:30 - 13:30

Lunch at INL

SESSIONS

SESSION 1F Room A / Parallel Session

SESSION 3E Room A / Parallel Session

SESSION 4G Room A / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrica-

Topic: 3. Micro/Nano Engineering for Physical and

tion Methods and Processes

Chemical Applications

Sub-topics: 1.4. Scanning Probe Lithography

Sub-topics: 3.4. Optics and Photonics

Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics: 4.5. Design and Fabrication of Mi-

13:30 - 15:00

cro/Nano Devices for Life Sciences: Biosensors, Prosthesis

“Fabrication of high resolution nano-devices by thermal scanning probe lithography” Yu Kyoung Ryu1; Colin Rawlings2; Martin Spieser2; Heiko Wolf1; Urs Duerig2; Zahid Durrani3; Mervyn Jones3; Sajedeh Manzeli4; Andras Kis4; Armin Knoll1 1 - IBM Zurich Research Laboratory; 2 SwissLitho; 3 - Imperial College London; 4 - EPFL Lausanne

“Accurate and automated fabrication of coupled gaussian microcavities using closed loop thermal Scanning Probe Lithography” Colin Rawlings1 :: Martin Spieser2 :: Darius Urbonas1 :: Thilo Stoeferle1 :: Rainer Mahrt1 :: Armin Knoll1 1 - IBM Research - Zurich :: 2 SwissLitho AG

13:45

“Sub-20 nm patterning of thin layer WSe2 by scanning probe lithography” Arancha I. Dago1; Yu Kyoung Ryu1; Ricardo Garcia1 1 - Instituto de Ciencia de Materiales de Madrid (CSIC)

“Micro-moirés combining metallic patterns and micro-lenses” Thomas Walger1 :: Juergen Brugger1 :: Roger Hersch2 :: 1 - Microsystems Laboratory, EPFL, Lausanne; 2 School of Computer and Communication Sciences, EPFL, Lausanne

14:00

“Atomic force microscopy as a tool for nanoscience, top-down fabrication and nanomechanicanical characterization”

“Integration of tunable liquid crystal microcells on 1.55µm photodetector arrays using nanoimprint technology”

13:30

Invited - “Multi-functional 3D scaffolds for organon-a-chip developments” Jenny Emneus Technical University of Denmark

“3D microdevice for the in vivo trapping of cancer-associated circulating cells” Alejandro Kayum Jiménez Zenteno1 :: Aurore EsMNE2017

20

Thursday, Sep 21st Matteo Lorenzoni1; Francesc Perez-Murano1; Laura Evangelio1; Steven Gottlieb1; Jordi Llobet2 1 - IMB-CNM; 2 - International Iberian Nanotechnology Laboratory

Benattou Sadani1 :: Benjamin Boisnard1 :: Thierry Camps1 :: Jean-Baptiste Doucet1 :: Véronique Bardinal1 :: Christophe Levallois2 :: Cyril Paranthoen2 :: Sophie Bouchoule3 :: Laurent Dupont4 1 - CNRS, LAAS, Univ de Toulouse; 2 - UMR FOTON, CNRS, INSA de Rennes, Université de Rennes; 3 - Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay; 4 - IMT Atlantique Technopôle Brest-Iroise

teve1 :: Hélène Cayron1,2 :: Sylvain Sanson3 :: Charline Blatché1 :: Christophe Vieu1 :: Bernard Malavaud3 :: Aline Cerf1 1 - LAAS-CNRS, Université de Toulouse; 2 - Innopsys; 3 - Department of Urology, Hôpital de Rangueil

14:15

“High-resolution thermal scanning probe lithography on silk fibroin as a fully water-based resist” Samuel Tobias Zimmermann1; Ya Wang1; Xiaosheng Zhang1; Juergen Brugger1 1 - Microsystems Laboratory, École Polytechnique Fédérale de Lausanne

“Light-driven reconfigurable GRIN optical element” Angelo Angelini1 :: Federica Pirani1,2 :: Francesca Frascella1 :: Emiliano Descrovi1 1 - Department of Applied Science and Technology (DISAT), Politecnico di Torino; 2 - Center for Space Human Robotics@Polito, Istituto Italiano di Tecnologia (IIT), Torino

“Fabrication of Three Dimensional Microelectrode Arrays with Carbon Nanotube Electrodes for in-vitro Investigation of Tissue Slices and 3D Cell Cultures” Lisa Kollmannthaler1 :: Pranoti Kshirsagar1 :: Stefan Klaus1 :: Gerhard Heusel1 :: Claus J. Burkhardt1 1 - NMI Natural and Medical Sciences Institute at the University of Tübingen, Reutlingen

14:30

Invited - “Probing emergent phenomena through large-scale atom manipulation” Sander Otte Delft University of Technology

“Sub-micron High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium” Joan Vila Comamala1 :: Lucia Romano2 :: Vitaliy Guzenko2 :: Mathias Kagias2 :: Konstantins Jefimovs2 :: Stampanoni Marco2 1 - ETH Zurich; 2 - Paul Scherrer Institut

“Two-photon Lithography Fabrication of 3D Stiffness-gradient Microscaffolds for Cancer Cell Invasiveness Studies” Enrico Domenico Lemma1 :: Barbara Spagnolo1 :: Francesco Rizzi1 :: Sara Sergio1 :: Marco Pisanello1 :: Massimo De Vittorio1 :: Ferruccio Pisanello1 1 - Istituto Italiano di Tecnologia, Center for Biomolecular Nanotechnologies

“Use of EBL, Dot-Matrix and DLW for fabrication of true color rainbow hologram, OVD, micro-nanooptics... designed by s/w “RainBow”

“Blister-Actuated Laser Induced Forward Transfer as a novel immobilisation approach for biosensor

14:45

activation” MNE2017

21

Thursday, Sep 21st

COFFEE BREAK

Coffee Break

15:00 - 15:30

Coffee Break / Exhibition

SESSIONS

SESSION 1G

15:30 - 16:30

Room A / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes

Sub-topics: 1.5: Pattern Transfer

Maxim Knyazev1 :: Alexander Svintsov1 :: Sergey Zaitsev1 :: Nazim Gusseinov1 :: Maratbek Gabdullin2 1 - Institute of microelectronics technology RAS; 2 - Al-Farabi Kazakh National University, Almaty, Kazakhstan

Lars Hecht1; Korbinian Rager1; Patricia Weber2; Andreas Dietzel1 1 - Technische Universität Braunschweig - Institute of Microtechnology; 2 - University of Tübingen – Institute for Physical and Theoretical Chemistry

SESSION 2F

Industrial Session

Room B / Parallel Session

Room C / Parallel

Topic: 2. Fabrication and Integration of Micro/Nano Structures, Devices and Systems

Sub-topics: 2.4: Smart System Design & Integration

15:30

15:45

“Easy alignment strategy for multi-level patterning” Aurore Estève1; Xavier Dollat1; Charline Blatché1; Aline Cerf1 1 - LAAS-CNRS, Université de Toulouse, CNRS, INSA, UPS, Toulouse, France

“Microfabrication strategies for magnetic nanoparticle manipulation on continuous bio-flows” Vania Silverio1; Maria J. López-Martínez1; João Gaspar2; Susana Cardoso De Freitas1; Paulo P. Freitas1,2 1 - Institute for Systems Engineering and Computers—Microsystems and Nanotechnologies (INESC-MN); 2 - International Iberian Nanotechnology Laboratory (INL)

“3D free forms in c-Si via gray-scale lithography and RIE” Isman Khazi1; Ulrich Mescheder1; Uma Maragatham Muthiah1

“SAW and EIS biosensors for environmental particulate monitoring” Maria Serena Chiriacò1; Silvia Rizzato1,2; Sandro Spagnolo2; Angelo Leo1,2; Giuseppe Maruc-

Industrial Session Presentations / Match Making / Exhibition

MNE2017

22

Thursday, Sep 21st

16:00

16:15

1 - Institute for Microsystem Technology, Furtwangen University

cio1,2 1 - CNR NANOTEC - Institute of Nanotechnology, 73100 Lecce, Italy; 2 - University of Salento, Dpt of Mathematics and Physics, via per Monteroni, 73100, Lecce

“Barium fluoride etch masks for dry etching applications” Valentin Mueller1; Jonas Strunz1; Tatjana Borzenko1; Johannes Kleinlein1; Laurens W. Molenkamp1 1 - Physikalisches Institut der Universitaet Wuerzburg, Wuerzburg, 97074, Germany

“Highly linear three-axial microprobing system built from orthogonally mounted silicon parallelogram linkages” David Metz1; Justin Chaillot1; Andreas Dietzel1 1 - TU Braunschweig, Institute of Microtechnology, Braunschweig, 38124, Germany

“Wide Area Plasmonic Colours by Nanoimprinted Lithography in Plastic Substrates” Keith Morton1; Teodor Veres1 1 - National Research Council Canada

“Thermal treatment for enhanced performance of NPDS(Nano Particle Deposition System) to fabricate large scale(1 m x 1 m) electrochromic windows” Jisoo Kim1; In-Gyu Choi1; Samuel Park1; Sung-Ik Park1; Doo-Man Chun2; Caroline S. Lee3; SungHoon Ahn1; Won-Shik Chu4 1 - Department of Mechanical and Aerospace Engineering, Seoul National University; 2 - School of Mechanical Engineering, University of Ulsan; 3 - Department of Materials Engineering, Hanyang University; 4 - Institute of Advanced Machinery and Design, Seoul National University

COFFEE BREAK

Coffee Break

16:30 - 17:00

Coffee Break / Exhibition

Industrial Session Presentations / Match Making / Exhibition

MNE2017

23

Thursday, Sep 21st SESSIONS 17:00 - 18:30

SESSION 1H

Room A / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes

Sub-topics: 1.7: Bottom-Up Methods

17:00

Invited - “Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering” Silvia Armini IMEC, Belgium

Room A / Parallel Session

Topic: 2. Fabrication and Integration of Micro/Nano

SESSION 4H

Room A / Parallel Session

Structures, Devices and Systems

Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics: 4.5: Design and Fabrication of Mi-

Sub-topics: 2.5: Packaging Technology & Reli-

cro/Nano Devices for Life Sciences: Biosensors,

ability

Prosthesis

“Surface-modified Scalable Silicon Heat Sink Technology for Electronics Cooling” Yichi Zhang1; Nicolas Green1; Shinichi Saito1; Yoshishige Tsuchiya1 1 - University of Southampton Nano Group

“Invited - Quantum dots for nanobioimaging and diagnostics” Beate Santos Universidade Federal de Pernambuco, UPFE, Brazil

“Mechanical production of thin electro-optical membranes” Nadege Courjal1; Florent Behague1; Alexis Caspar1; Ludovic Gauthier-Manuel1; Anthony Pérignon1; Venancio Calero1; Gwenn Ulliac1; Miguel Suarez1; Maria-Pilar Bernal1 1 - FEMTO-ST institute, Univ. Bourgogne Franche

17:15

17:30

SESSION 2G

“DNA-Protein Self-Assemblies for Bigger, Better Nanostructures” J. Alexander Liddle1; Veronika Szalai1; Daniel Schiffels2 1 - Center for Nanoscale Science and Technology, National Institute of Standards and Technology; 2 - Maryland NanoCenter, University of Maryland

Invited - “Stretching fan-out wafer level packaging to new limits and markets” Andre Cardoso Nanium, Portugal

“Drug loaded polymer microneedles fabricated by hot embossing” Thor Emil Andersen1; Alina Joukainen Andersen1; Ritika Singh Petersen1; Line Hagner Nielsen1; Stephan Sylvest Keller1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Department of Micro- and Nanotechnology, Technical University of Denmark MNE2017

24

Thursday, Sep 21st 17:45

“Diblock on Diblock Copolymers for In Situ-Directed Self-Assembly and Multilayer Masking” Sozaraj Rasappa1 1 - Tampere University of Technology

18:00

“Lithographically Templated Organization of Nanodumbbells” Avichai Marcovici1; Guillaume Le Saux2; Pazit Rukenstein2; Taleb Mokari2; Mark Schvartzman2 1 - Ben_Gurion University of the Negev; 2 Ben-Gurion University of the Negev

“A method to alleviate hot spot problem in 3D IC” Ligang Hou1; Tongyang Ye1; Qiming Luo1; Jingyan Fu2; Jinhui Wang2 1 - VLSI and System Lab, Beijing University of Technology, Beijing; 2 - Department of Electrical and Computer Engineering, North Dakota State University

“Nanoparticle Assembly: Controlling Topography and Capillary Forces at the Nanoscale to Build Functional Devices” Valentin Flauraud1; Massimo Mastrangeli2; Gabriel D. Bernasconi3; Jeremy Butet3; Duncan T.L. Alexander4; Elmira Shahrabi1; Olivier J.F. Martin3; Juergen Brugger1 1 - Microsystems Laboratory, (EPFL) Ecole Polytechnique Federale de Lausanne; 2 - Department of Bio, Electro and Mechanical Systems, Université Libre de Bruxelles; 3 - Nanophotonics and Metrology Laboratory, École Polytechnique Fédérale de Lausanne; 4 - Interdisciplinary Center for Electron Microscopy, École Polytechnique Fédérale de Lausanne

“A Prediction Methodology of Reliability Test Result Using Wafer Test Pattern Classification in DRAM” Beomjun Kwon1,2; Jee-Hyong Lee1; Hyungsin Kwon2; Heeil Hong2; Hongsun Hwang2; Kangyong Cho2; Sungjin Jang2 1 - Sungkyunkwan Univ.; 2 - Samsung Electronics Co. Ltd.

18:15

“Biosensing with Graphene Field-Effect Transistors” Jerome Borme1; Rui Campos1; Elisabete Fernandes1; George Machado Jr.1,2; Patricia D. Cabral1,2; Maria F. Cerqueira2; Pedro Alpuim1,2 1 - International Iberian Nanotechnology Laboratory (INL); 2 - Department of physics, University of Minho

Invited - Nanomechanics for the life sciences Montserrat Calleja Microelectronics Institute of Madrid, CSIC, Spain

MNE2017

25

Thursday, Sep 21st SPECIAL SESSIONS 18:30 - 20:00

Lab Tours

Industrial Session

Lab tours to INL flagship facilities Refreshments

Room B / Parallel

QIL and IP Session

Room C / Parallel

Industrial Session Presentations / Match Making / Exhibition

Quality, Innovation, Legal and IP Session V

BARBECUE

Exhibitors / Sponsors Barbecue

20:00 - 22:00

Exhibitors / Sponsors Barbecue (only for exhibitors/sponsors)

MEETING

Young people meeting

22:00 - 23:45

Young people meeting

MNE2017

26

Friday, Sep 22nd PLENARY TALK

Plenary Talk

9:00 - 9:45

Naomi Halas (Rice University, USA) - Plasmonics for Sustainability

SESSIONS

SESSION 1I

9:45 - 10:30

Room A / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes

Sub-topics: 1.8: Other (Printing I)

SESSION 2H

Room A / Parallel Session

SESSION 3F

Room A / Parallel Session

Topic: 2. Fabrication and Integration of Micro/Nano

Topic: 3. Micro/Nano Engineering for Physical and

Structures, Devices and Systems

Chemical Applications

Sub-topics: 2.1: Fabrication & Integration of

Sub-topics: 3.5: Nanomagnetism

Micro/Nano Electronic Devices 9:45

“Invited - Scalable Printing of Nano and Microscale Electronics and Wearable Sensors

“Tip-Enhanced Raman characterization of He-ion-irradiated CVD graphene channels”

“Magnetic vortex states in concentric asymmetric

Ahmed Busnaina”

Taharh Zelai1; Takuya Iwasaki2; Stuart Boden3;

Jhonny Avila1; Iuri Stefani Brandt2; Jérôme

Nano OPS, Inc. and Northeastern University,

Harold Chong3; Hiroshi Mizuta2; Yoshishinge

Borme3; Milton Andre Tumelero2; Alexandre

Boston

Tsuchiya3

Viegas2; Paulo Freitas3; André Avelino Pasa2

1 - Nanoelectroincs and Nanotechnology Group,

1 - Departement de Physique, Universite de

Department of Electronics and Computer Sci-

Liege; 2 - Laboratório de Filmes Finos e Super-

ence, University of Southampton; 2 - School of

fícies, Departamento de Física, Universidade

Materials Science, Japan Advanced Institute of

Federal de Santa Catarina, Brazil; 3 - Internation-

Science and Technology; 3 - Nanoelectroincs

al Iberian Nanotechnology Laboratory

nanorings”

and Nanotechnology Group, Department of Electronics and Computer Science, University of Southampton 10:00

“Observation of Single Carrier Transport Behavior

“Functional Oxides for nano-eletronics and spin-

in Graphene Nano Constrictions”

tronics”

Zhongwang Wang1; Takuya Iwasaki1; Manoha-

Anna Grazia Monteduro1,2; Silvia Rizzato1,2;

ran Muruganathan1; Hiroshi Mizuta1

Zoobia Ameer1,2; Angelo Leo1,2; Chiara Leo1;

1 - School of Material Science, Japan Advanced

Shilpi Karmakar2; Vittorianna Tasco2; Anna Paola MNE2017

27

Friday, Sep 22nd Institute of Science and Technology (JAIST)

Caricato1; Maurizio Martino1; D.D. Sarma3; Giuseppe Maruccio1,2 1 - Department of Mathematics and Physics, University of Salento, Italy; 2 - CNR-Nanotec, Italy; 3 - SSSC Indian Institute of Science

10:15

“Multimaterial Multilayer Inkjet Printing”

“Precise determination of microwave modes in

Anita Fuchsbauer1; Florian Durst1; Helene

“Wafer-scale measurements of the specific contact resistance between different metals and mono-

Außerhuber1; Vanessa Tober1; Michael Mühl-

and multi-layer graphene”

R. Dutra1; D. E. Gonzalez-Chavez1; L. Guerra1;

berger1

Sten Vollebregt1; Manvika Singh1; Dominique

G. C. F Navarro1; R. L. Sommer1

1 - PROFACTOR GmbH, Functional Surfaces and

Wehenkel2; Richard Van Rijn2; Pasqualina Sarro1

1 - Centro Brasileiro de Pesquisas Físicas, Rio de

Nanostructures, Austria

1 - Delft University of Technology; 2 - Applied

Janeiro

arrays of Py micro stripes”

Nanolayers COFFEE BREAK

Coffee Break

10:30 - 11:00

Coffee Break / Exhibition

SESSIONS

SESSION 1J

11:00 - 11:30

Room A / Parallel Session

SESSION 2I

Room B / Parallel Session

SESSION 3G

Room C / Parallel Session

Topic: 1. Novel Developments in Nano/Micro Fabrica-

Topic 2. Fabrication and Integration of Micro/Nano

Topic 3. Micro/Nano Engineering for Physical and

tion Methods and Processes

Structures, Devices and Systems

Chemical Applications

Sub-topics: 1.8: Other (Printing I)

Sub-topics: 2.1: Fabrication & Integration of

Sub-topics: 3.5: Nanomagnetism

Micro/Nano Electronic Devices 11:00

“Invited - Closing the gap – High precision printing from lab to fab” Ruth Houbertz Multiphoton Optics GmbH, Germany

“Strain coupling optimization in Magnetoelectric Cells”

“Magnetic Vortices in Lithographed Nanostructures”

Davide Tierno1; Rutger Duflou2; Florin Ciubota-

Luiz Carlos Sampaio Lima1; Jeovani Brandão2;

ru3; Iuliana Radu3; Christoph Adelmann3

Paulo Roberto Soledade1; Danilo Froes1; Pablo

1 - imec, KU Leuven; 2 - KU Leuven; 3 - imec

Ramon Batista1; André Luiz Pinto1; Alexandre MNE2017

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Friday, Sep 22nd Martins De Souza1; Flavio Garcia1; Alberto Passos Guimarães1; Joao Paulo Sinnecker1 1 - Centro Brasileiro de Pesquisas Físicas, Rio de Janeiro, Brazil.; 2 - LNLS - CNPEM - Campinas, Brazil 11:15

“MnO and CeO2 based resistive switching memory for a high resistance ratio crossbar application”

“Patterned T-shaped Magnetic Structures Exhibit-

Quanli Hu1; Tae Su Kang1; Haider Abbas1; Tae

Elis H.C.P. Sinnecker1; José Miguel Garcia Mar-

Sung Lee1; Nam Joo Lee1; Mi Ra Park1; Tae-Sik

tin2; Joao Paulo Sinnecker3

Yoon2; Chi Jung Kang1

1 - Instituto de Física, UFRJ, Rio de Janeiro, Bra-

1 - Department of Physics, Myongji University; 2

zil; 2 - Instituto de Microelectronica de Madrid,

- Department of Materials Science and Engineer-

CSIC, Madrid, Spain; 3 - Centro Brasileiro de

ing, Myongji University

Pesquisas F ́ısicas, Rio de Janeiro, RJ, Brazil

ing Four Different Stable Magnetic States”

MEE

MEE Young Investigator Award

11:30 - 12:00

MEE Young Investigator Award

PLENARY

Plenary Talk

TALK

Plenary talk - Vincent Hayward (Institute of Philosophy, School of Advanced Study, University of London & Actronika SAS, Paris) - Tactile

12:00 - 12:45

mechanics — a new avenue for nano-engineering?

CLOSING

Closing Remarks

12:45 - 13:15

Closing Remarks

MNE2017

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MNE2017

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THANK YOU! INL - International Iberian Nanotechnology Laboratory Avenida Mestre JosĂŠ Veiga s/n 4715-330 Braga - Portugal

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Phone: Tel. (351) 253 140 112 Fax: (351) 253 140 119 Email: info@mne2017.org