Open Research Infrastructure to support companies operating in the field of micro-nanoelectronics NanoMicroFAB Alessandro Pecora Research Scientist Istituto per la Microelettronica e Microsistemi-CNR Manager of the NanoMicroFab facility alessandro.pecora@cnr.it
CNR Research Parks - Lazio Montelibretti research area: 14 Institutes
Tor Vergata research area: 7 Institutes Competences
Competences
ENERGY
AGRIFOOD
MICRO/ NANOELETTRONICS
ENVIRONMENT
BIOMEDICINE
CHEMISTRY
CLIMATE ENVIRONMENT SPACE Institute of Structure of the Matter Institute for Microelectronics and Microsystems Institute for Photonic and Nanotechnologies Institute of Atmospheric Sciences and Climate
Institute of Translational Pharmacology
Institute of Acoustic and Sensors
Institute for Space Astrophysics and Planetology
MEDICAL DEVICES CULTURAL HERITAGE
CNR Departments 1.
Physical sciences and technologies of matter
2.
Earth system science and environmental technology
3.
Agrifood science
4.
Biomedical sciences
5.
Chemical sciences and technology of materials
6.
Engineering, ITC and technologies for energy and transport
7.
Human and social sciences, cultural heritage National Institute for Astrophysics
Institute of Structure of the Matter Institute of Atmospheric pollution Research Water research institute Institute of environmental geology and geoengineering Institute of agricultural biology and biotechnology Institute of agro-envinronmental and forest biology Institute of biostructure and bioimaging Institute of nanostructured materials Methodological chemistry institute Institute of Crystallography Construction technologies institute Institute for technologies applied to cultural heritage Institute for the Study on Ancient Mediterranean Institute for the Conservation and Promotion of Cultural Heritage
DIREZIONE REGIONALE PER LO SVILUPPO ECONOMICO E LE ATTIVITA' PRODUTTIVE AVVISO PUBBLICO INFRASTRUTTURE APERTE PER LA RICERCA
L.R.13/2008 05/09/2017- BOLLETTINO UFFICIALE DELLA REGIONE LAZIO- N.71
Support the creation of a network of platforms specialized in the transfer of technological innovation, with reference to the framework of Key Enabling Technologies ("KET"), in line with the development trajectories identified by the Smart Specialization Strategy of Lazio, working as bridges between research, business and market.
Approved projects • CNR NanoMicroFAB – Open Research Infrastructure to support companies operating in the field of micro-nanoelectronics 4.000.000 Euro KET: Micro e Nano Elettronica - Facility di Micro-nanofabbricazione per materiali e dispositivi avanzati
KET
• ENEA MAIA – Materiali Avanzati in una Infrastruttura Aperta 3.960.345 Euro KET: Materiali Avanzati - Material development for Additive manufacturing
• INFN
• Biotecnologie; • Micro e nanoelettronica; • Fotonica; • Nanotecnologie; • Materiali avanzati; • Sistemi di fabbricazione avanzati
LATINO – Laboratory in Advanced Technologies for INnOvation 2.502.259 Euro KET: Sistemi di fabbricazione avanzati - High/low Power Radio Frequency systems, characterization of magnetic elements, ultra-high vacuum, heat treatments and mechanical design.
• Uni Sapienza ATOM – Advanced Tomography and Microscopies 3.878.830 Euro KET: Nanotecnologie - Characterization of materials and devices with advanced Tomography and Microscopies techniques.
Smart Specialisation Strategy (S3) in Lazio region The current Specialization Areas and the associated Key Enabling Technologies:
Aerospace: Photonics, ICT, Advanced Materials, Nanotechnologies, Micro/Nanoelectronics and Advanced Manufacturing Systems; Life Sciences: Industrial Biotechnologies, ICT, Advanced Materials, Nanotechnologies and Micro/Nanoelectronics; Technologies for Cultural heritage and culture : ICT and Micro/Nanoelectronics; Agrifood: ICT; Creative and digital industries: ICT, Advanced Materials and Micro / Nanoelectronics;
Green Economy (Energy, Environment and Mobility): ICT, Advanced Materials and Micro/Nanoelectronics. Security (homeland security): Photonics, ICT, Advanced Materials, Nanotechnologies.
Partner
DSFTM Department of Physical Sciences and Technologies of Matter
• CNR – Department of Physical sciences and technologies of matter • Institute for Microelectronics and Microsystems (IMM) • Institute for Photonic and Nanotechnologies (IFN) • Institute of Structure of the Matter (ISM)
Associate Partners: • Leonardo-Finmeccanica • Università di Tor Vergata, Dipartimento Ingegneria Elettronica
• The NanoMicroFab project has been approved by the Lazio region for a total cost of 4 M€ (2,6 M€ funded by Regione Lazio and 1,4 M€ provided by the partners).
Objectives of the NanoMicroFab project • To set-up a facility allowing to support companies operating in the field of micro-nanoelectronics by providing several services: supply new materials; development of processes and devices; design and characterization of materials and devices • Integrate several CNR existing infrastructures with those of the Univ. of Tor Vergata; • Upgrade the existing infrastructures through the acquisition of new equipment
• Application Areas • GaN-based electronics • Flexible and printed electronics • Sensors, microsystems and IoT
The micro-nanofabricatio facility • Distributed facility over three main sites • CNR clean-rooms located in the Area Tor Vergata • Labs located inside Leonardo plant where CNR will establish a lab to grow epitaxial layers of GaN by MOCVD • Labs located at the Electronic Engineering Dept. Univ. Tor Vergata
• Rationalize the CNR clean-room facility in the Roman area • Integrate existing clean room facility at IFN and IMM • Upgrade of IMM clean room located in Area Tor Vergata to host both new equipment as well as IFN-Roma equipments
GaN-based electronics
â&#x20AC;˘ GaN properties are particularly suitable for applications in power electronics (voltages < 600V) and high frequencies
GaN-based electronics â&#x20AC;˘ Leonardo-Finmeccanica has a GaAs/GaN Foundry for defense and aerospace applications
â&#x20AC;˘ CNR, Univ. Tor Vergata and Leonardo have a long standing collaboration on GaN technology and device characterization
GaN-based electronics • Joint lab CNR - Leonardo-Finmeccanica for the epitaxial growth of GaN on SiC and GaN on Si (new MOCVD system for small production) • AlGaN/GaN structures for High-electron-mobility transistor (HEMT) based devices
• Development of a full line to fabricate GaN devices at CNR labs (upgrade of optical and electron beam lithography) • Design and characterization of GaN devices
Device and circuits on unconventional substrates
Organic/hybrid solar cells OLED lighting
Ultra-thin substrates
Flexible and printed electronics applications
Flexible and comformable large area sensors
Biomedical applications Flexible displays
-
Wearable systems and smart textiles
Smart skin patches Electronics Wristbands Disposable devices Implantable electrodes and devices
paper
RFID and smart cards
Flexible and Printed Electronics â&#x20AC;˘ Within the NanoMicroFab project a joint lab between CNR and Univ. Tor Vergata will be established to fabricate electronic and optoelectronic devices on flexible substrates. In the joint lab the following technology are available:
Gravure printer Labratester NSM
High-performance polycrystalline silicon devices and circuits on ultra-flexible substrates based on excimer laser crystallization.
Printing techniques for low-cost organic devices and circuits on flexible plastic substrates
Inkjet printer Dimatix DMP 2800
Printed organic/hybrid solar cells on flexible sustrates.
Flexible and Printed Electronics â&#x20AC;˘ The current facility will be upgraded by acquiring new systems Optical lithography system
Fast maskless lithography system with minimum feature size 1 Âľm, for substrates up to 22x22 cm2
Laser scribing and micromachining tool
Selective laser ablation of nanometer material layers for photovoltaic and electronic device fabrication on flexible substrates
Sensors, Microsystem and IoT
Source: Yole Développement – MEMS Report
Sensors, Microsystem and IoT- examples of devices and sensor
Ultra-flexible microelectrode arrays for in vivo measurements
Gas sensors for environmental monitoring
Array of capacitive pressure sensors
THz flexible filter as sensor of bending radii
Wearable sensors Disposable biomedical devices
Photonic Crystal Nanocavities for gas and strain sensing
Waveguide Single Photon Detectors
LabOnChip
Surface acoustic wave sensors
MEMS
Sensors for ionising radiation detection
Sensors, Microsystem and IoT NanoMicroFab will exploit the expertise as well as the equipment available and those to be acquired to offer services and products in the area of sensors and microsystems, including: • Processes to deposit functional materials and fabricate solid state sensors for chemical and physical sensing (gas sensors, tactile sensors, biosensors, strain gauge, …) • MEMS (accelerometers, giroscopes, …) • Microsystems (microbolometers, metamaterials) • Lab on chip (microfluidic,…) • Functional characterization of sensors
Materials Characterization • The NanoMicroFab facility will offer a wide range of advanced techniques for material characterization, including: • • • • •
Scanning probe microscopy X-ray diffraction Photoemission spectroscopy Optical spectroscopy (UV-Vis, FTIR, Raman) Ultra-fast optical spectroscopy
• The characterization techniques will be upgraded through a series of selected actions in the field of scanning probe microscopy, photoemission and optical spectroscopies
Probe' 240nm'<20000nm'
Device Characterization The NanoMicrofab facility will also offer a wide range of device characterization techniques, including: • DC and AC electrical characterization at different temperatures • Thermal characterization of the devices (self-heating)
• Failure analysis, technology yield, aging, and long-term measurements. • High frequency electrical characterization (up to 110 GHz, 3 Vector Network Analysers (0.05-110 GHz), 2 Spectrum Analyser (3Hz-50GHz) Noise Measurement System (DC-40 GHz), Cryogenic Probe Station to 40 GHz)
Services Chemical-Physical Characterization
• • • • •
SNOM, STM, AFM Raman & IR spectroscopy Spectral Photometry Scanning Electron Microscopy Energy Dispersive Spectrometry
Materials Production • • • • •
Optical and Electrical characterizations • Analytical Micro-Probe Systems for DC and HF • Source measure units • Fiber optics spectrophotometers for UV-VIS • Vector Network Analyzer for Sparameter • Anechoic Chamber for millimeter wave antenna
•
• • • • • •
Hot Filament CVD Pulsed laser Ablation RF&MW-PECVD RF & DC Sputtering E-beam thermal deposition Processes for Device Fabrication Femtosecond and Excimer Laser Treatments Reactive Ion Etching Optical and Electron beam lithography Rapid Thermal Annealing Printing systems Optical and electronic microscopes Nanoimprinting
Theoretical Modelling • Device Physics: 2D & 3D physical simulations • Compact Modeling: development of numerical models for new devices • Tunable photonic microsystems • High Frequency Microsystems • Microwave Microscopy Techniques • Synopsys® Technology CAD (semiconductor device simulation) • CADENCE® Virtuoso (IC circuit design and simulation) • COMSOL® Multiphysics
Companies that have already expressed interest in services offered by the NanoMicroFab facility • • • • • • • • • •
Airgloss (Roma, Italia) Fondazione BIETTI (Roma, Italia) CAEN SpA (Viareggio, Italia) DUNE srl (Roma, Italia) Fonderie Digitali (Roma, Italia) Global Solar Fund Eng. (Roma, Italy) INFN (Frascati, Italia) IDIBABS (Barcellona, Spagna) Ionvac Process (Pomezia, Italia) Leonardo-Finmeccanica (Roma, Italia)
• • • • • • • • • •
LFoundry (Avezzano, Italia) Fondazione INUIT (Roma, Italia) MITEC srl (Roma, Italia) NANOFABER srl (Roma, Italia) New Tech System Generation, NTSG, (Roma, Italia) Peopletrust srl (Roma, Italia) PPG Italia Business Support Srl (Milano, Italia) Progetti Speciali Italiani srl (Roma, Italia) SUPERELECTRIC (Tempio Pausania, Italia) Wave UP srl (Firenze, Italia)
Great attention will be paid to companies located in the Regione Lazio, however, thanks to the European integration of the NanoMicroFab facility, it will be possible to offer services to a much wider market
Dr. Alessandro Pecora Research Scientist Researcher of Istituto per la Microelettronica e Microsistemi-CNR Manager of the NanoMicroFab facility via del Fosso del Cavaliere, 100 - 00133 Roma (ITALY) email : alessandro.pecora@cnr.it phone : +39 06 49934064 mob.ph. : +39 366 8328075 skype : alex.pecora