30 GHz RF-MEMS Dicke Switch Network and a Wideband LNA in a 0.25 µm SiGe BiCMOS Technology

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Advances in Microelectronic Engineering (AIME) Volume 3, 2015 doi: 10.14355/aime.2015.03.001

www.seipub.org/aime

30 GHz RF-MEMS Dicke Switch Network and a Wideband LNA in a 0.25 µm SiGe BiCMOS Technology Shakila Bint Reyaz1,2, Carl Samuelsson3*, Andreas Gustafsson3, Robert Malmqvist1,3, Rolf Jonsson3, Mehmet Kaynak4, Anders Rydberg1 1

Department of Solid-State Electronics, Uppsala University, 751 05 Uppsala, Sweden

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Departement of Telecommunications, NED University of Engineering and Technology, 75210 Karachi, Pakistan

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Swedish Defence Research Agency (FOI), 583 30 Linköping, Sweden

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IHP GmbH, 15236 Frankfurt (Oder), Germany

*Now with SAAB AB, 581 88 Linköping, Sweden shakila.bint.reyaz@angstrom.uu.se; 2carl.samuelsson@sabbgroup.com; 3andreas.gustafsson@foi.se; robert.malmqvist@foi.se; 5rolf.jonsson@foi.se; 6kaynak@ihp-microelectronics.com; 7anders.rydberg@angstrom.uu.se

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Abstract This work presents a novel monolithic integration of a 30 GHz RF-MEMS Dicke switch network and a wideband LNA realised in a 0.25 μm SiGe BiCMOS process. The wideband LNA design has a measured gain of 10-19.9 dB at 2-33 GHz given a DC power consumption (PDC) of 35 mW and a measured noise figure of 5.4-6.3 dB at 14-26.5 GHz when PDC=7.5 mW (the LNA gain is then 10-14.2 dB at 4-26 GHz). The Dicke switch has 3 dB and 22 dB of losses and isolation at 25 GHz. The MEMS switched LNA gain was found to be 10-17 dB lower than anticipated due to some unintentionally missing metal via contacts between the Dicke switch and LNA ground planes. Despite this fact, the MEMS LNA resulted in a measured isolation of 9.0-13.5 dB at 24-31 GHz when the Dicke switch was switched ON and OFF which validates the switching function of the SiGe RF-MEMS wideband LNA design. Such reconfigurable low-power MEMS switched RFICs could be used in highly adaptive broadband receiver front-ends for wireless communication, sensor networks and imaging systems, for example. Keywords Low Noise Amplifier; Millimeter Wave; RFIC; Receiver; RF-MEMS

Introduction Reconfigurable high-performance integrated circuits are key elements in RF systems for wireless communication, space, defense and security applications at microwave and millimeter-wave frequencies. RF-Micro-ElectroMechanical-Systems (MEMS) switches present low losses/DC power and high linearity/isolation over large bandwidths making them attractive candidates for highly adaptive broadband front-end architecture solutions; e.g. switches used in handsets, and radar sensors [1], [2]. On-chip integration of RF-MEMS and active RF devices is a next step in the development of reconfigurable Monolithic Microwave/RF Integrated Circuits (MMICs/RFICs) as some foundries have integrated MEMS switches on top of III-V and silicon substrates, and it can further improve the system performance [3]–[8]. This is especially important in low-noise receivers where there are the losses before the first amplification stage, i.e. the low-noise amplifier (LNA) has an impact on the over-all noise figure (NF) and receiver sensitivity. RF-MEMS together with active RF circuitry has so far with a few notable exceptions mostly been realised as hybrid circuits and mainly at frequencies below 30 GHz which still leaves room for significant improvements to be made in terms of RF performance, frequency range, functionality as well as to achieve reduced complexity (higher integration) and lower costs. The first known examples of on-chip integration of RF-MEMS in switched LNA and power amplifier circuits up to 30 GHz were demonstrated using the Rockwell Scientific GaAs MMIC process [3], [4]. More recently, some GaAs and silicon based MEMS & switched LNA ICs were presented with an NF of 2-4 dB and 7-8 dB up to 26.5 GHz and 77 GHz, respectively [5]–[8]. The first and only silicon MEMS LNAs operating above 10 GHz that has been reported so far are two narrow-band and dual-band (switchable)

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